Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings

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Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings

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ژورنال

عنوان ژورنال: Thin Solid Films

سال: 2001

ISSN: 0040-6090

DOI: 10.1016/s0040-6090(01)01348-7